%0 Journal Article
%T Development and experimental study of large size composite plasma immersion ion implantation device
%A SONG, Falun
%A LI, Fei
%A ZHU, Mingdong
%A WANG, Langping
%A ZHANG, Beizhen
%A GONG, Haitao
%A GAN, Yanqing
%A JIN, Xiao
%J Plasma Science and Technology
%V 20
%N 1
%P 5
%@ 1009-0630
%D 2018-01-01
%~ DeepDyve