%0 Journal Article
%T The Development of Dioptric Projection Lenses for Deep Ultraviolet Lithography
%A Ulrich, Willi
%A Rostalski, Hans-Jürgen
%A Hudyma, Russ
%J Optical Review
%V 10
%N 4
%P 233-240
%@ 1340-6000
%D 2003-01-01
%I Springer-Verlag
%~ DeepDyve