%0 Journal Article
%T XPS Evaluation of Samples Surface Cleaned by the XEI Evactron®
%A Walck, Scott D
%A Strohmeier, Brian R
%A Goralski, Edward G
%A Vane, Ronald A
%J Microscopy and Microanalysis
%V 7
%N S2
%P 892-893
%@ 1431-9276
%D 2001-08-01
%~ DeepDyve