%0 Journal Article
%T Simulation of Pull-in mechanism of plate actuator considering damping
%A Liu, Xin
%A Fang, Yuming
%A Zhang, Wenxu
%A Man, Wenwen
%A Ji, Lili
%J Journal of Physics: Conference Series
%V 1303
%N 1
%P 7
%@ 1742-6588
%D 2019-08-01
%~ DeepDyve