%0 Journal Article
%T A novel anti-shock silicon etching apparatus for solving diaphragm release problems
%A Sha-Li, Shi
%A Da-Peng, Chen
%A Yi, Ou
%A Yu-Peng, Jing
%A Qiu-Xia, Xu
%A Tian-Chun, Ye
%J Chinese Physics B
%V 19
%N 6
%P 5
%@ 1674-1056
%D 2010-06-01
%~ DeepDyve