%0 Journal Article
%T Freestanding smooth micron-scale polydimethylsiloxane (PDMS) membranes by thermal imprinting
%A Engel, L
%A Shklovsky, J
%A Schrieber, D
%A Krylov, S
%A Shacham-Diamand, Y
%J Journal of Micromechanics and Microengineering
%V 22
%N 4
%P 8
%@ 0960-1317
%D 2012-04-01
%~ DeepDyve