%0 Journal Article
%T Ultraviolet annealing of tantalum oxide films grown by photo-induced chemical vapour deposition
%A Zhang, Jun-Ying
%A Boyd, Ian W
%A Dusastre, Vincent
%A Williams, David E
%J Journal of Physics D: Applied Physics
%V 32
%N 19
%@ 0022-3727
%D 1999-10-07
%~ DeepDyve