%0 Journal Article
%T Comb-drive XYZ-microstage based on assembling technology for low temperature measurement systems
%A Xue, Gaopeng
%A Toda, Masaya
%A Ono, Takahito
%A ,
%J 2015 International Conference on Electronic Packaging and iMAPS All Asia Conference (ICEP-IAAC)
%D 2015-04-01
%I IEEE
%~ DeepDyve