%0 Journal Article
%T Differential Body Effect Analysis and Optimization of the   LArge Tilt Implanted Sloped Shallow Trench Isolation Process (LATI-STI)
%A Deleonibus, Simon
%A Heitzmann, Michel
%A Gobil, Yveline
%A Martin, François
%A Demolliens, Olivier
%A Jean-Charles Guibert , Jean-Charles Guibert
%A Alain Toffoli 
   , Alain Toffoli
%J Japanese Journal of Applied Physics
%V 35
%N 8A
%@ 0021-4922
%D 1996-08-01
%~ DeepDyve