%0 Journal Article
%T The Challenge of Measuring Strain in FDSOI Device Structures – HRXRD as a Potential Method of Resolution 
%A Geisler, Holm
%A Weisheit, Martin
%A Hofmann, Petra
%A Engelmann, Hans‐Juergen
%J Advanced Engineering Materials
%V 19
%N 8
%P n/a-n/a
%@ 1438-1656
%D 2017-08-01
%I Wiley Subscription Services, Inc., A Wiley Company
%~ DeepDyve