%0 Journal Article
%T Support system for fine focusing and astigmatism correction using an auditory signal in scanning electron microscopy
%A Oho, Eisaku
%A Suzuki, Kazuhiko
%A Yamazaki, Sadao
%J Microscopy
%V 66
%N 3
%P 187-197
%@ 2050-5698
%D 2017-06-01
%I The Japanese Society of Microscopy
%~ DeepDyve