%0 Journal Article
%T Early learning on hyper-NA lithography using two-beam immersion interference
%A Hendrickx, Eric
%J Proceedings of SPIE
%V 6154
%N 1
%P 61541X-61541X-11
%@ 0277-786X
%D 2006-03-10
%I SPIE
%~ DeepDyve