%0 Journal Article
%T Automated Inspection Of IC Photomasks
%A Ciarlo, D. R.
%A Schultz, P. A.
%A Novotny, D. B.
%J Proceedings of SPIE
%V 55
%P 84-89
%@ 0277-786X
%D 1974-03-01
%I SPIE
%~ DeepDyve