%0 Journal Article
%T Study of air-bubble-induced light scattering effect on image quality in 193-nm immersion lithography
%A Fan, Yongfa
%J Proceedings of SPIE
%V 5377
%N 1
%P 477-486
%@ 0277-786X
%D 2004-05-28
%I SPIE
%~ DeepDyve