%0 Journal Article
%T Ion irradiation-induced sputtering and surface modification of BN films prepared by a reactive plasma-assisted coating technique
%A Matsuda, T.
%A Hamano, T.
%A Asamoto, Y.
%A Noma, M.
%A Yamashita, M.
%A Hasegawa, S.
%A Urabe, K.
%A Eriguchi, K.
%J Japanese Journal of Applied Physics
%V 61
%N SI
%P 9
%@ 0021-4922
%D 2022-07-01
%I IOP Publishing
%~ DeepDyve