%0 Journal Article
%T A comparison of principal component analysis, multiway principal component analysis, trilinear decomposition and parallel factor analysis for fault detection in a semiconductor etch process
%A de Noord, Onno E.
%A Smilde, Age K.
%J Journal of Chemometrics
%V 13
%N 3‐4
%P 379-396
%@ 0886-9383
%D 1999-05-01
%I Wiley Subscription Services, Inc., A Wiley Company
%~ DeepDyve