%0 Journal Article
%T Fabrication of poly‐Si complementary metal oxide semiconductor inverter by all sputtering deposition process
%A Yeh, Wenchang
%A Huang, Boting
%J Journal of the Society for Information Display
%V 22
%N 7
%P 364-369
%@ 1071-0922
%D 2014-07-01
%I Wiley Subscription Services, Inc., A Wiley Company
%~ DeepDyve