%0 Journal Article
%T Micromechanical characterization of chemically vapor deposited ceramic films
%A Grow, J. M.
%A Levy, R. A.
%J Journal of Materials Research
%V 9
%N 8
%P 2072-2078
%@ 0884-2914
%D 1994-08-01
%I Springer International Publishing
%~ DeepDyve