%0 Journal Article
%T Micromachined integrated self-adaptive nonlinear stops for mechanical shock protection of MEMS
%A Xu, Kaisi
%A Jiang, Fushuai
%A Zhang, Wei
%A Hao, Yilong
%J Journal of Micromechanics and Microengineering
%V 28
%N 6
%P 9
%@ 0960-1317
%D 2018-06-01
%~ DeepDyve