%0 Journal Article
%T Application of focused ion-beam sampling for sidewall-roughness measurement of free-standing sub-μm objects by atomic force microscopy
%A Nagatomi,, Takaharu
%A Nakao,, Tatsuya
%A Fujimoto,, Yoko
%J Microscopy
%V 69
%N 1
%@ 0022-0744
%D 2020-03-09
%I The Japanese Society of Microscopy
%~ DeepDyve