%0 Journal Article
%T Cross-Contamination during Ferroelectric Nonvolatile Memory Fabrication
%A Gilbert, Stephen R.
%A Ritchey, Debbie
%A Tavassoli, Malahat
%A Amano, Jun
%A Colombo, Luigi
%A Summerfelt, Scott R.
%J Journal of the Electrochemical Society
%V 148
%N 4
%P G195-G199
%@ 0013-4651
%D 2001-04-01
%~ DeepDyve