%0 Journal Article %T Multilayer reflection-type zone plates and blazed gratings for the normal incidence soft x-ray region %A Kleineberg, Ulf %A Fuchs, Detlef %A Heidemann, Klaus F. %A Thieme, Juergen %J Proceedings of SPIE %V 2279 %N 1 %P 269-282 %@ 0277-786X %D 1994-11-11 %I SPIE %~ DeepDyve