%0 Journal Article
%T Nanoimprint system development and status for high-volume semiconductor manufacturing
%A Takashima, Tsuneo
%A Takabayashi, Yukio
%A Nishimura, Naosuke
%A Emoto, Keiji
%A Matsumoto, Takahiro
%A Hayashi, Tatsuya
%A Kimura, Atsushi
%A Choi, Jin
%A Schumaker, Philip
%J Proceedings of SPIE
%V 9777
%P 977706-977706-9
%@ 0277-786X
%D 2016-03-22
%I SPIE
%~ DeepDyve