%0 Journal Article
%T Data path development for multiple electron beam maskless lithography
%A Krecinic, Faruk
%A Lin, Shy-Jay
%A Chen, Jack J. H.
%J Proceedings of SPIE
%V 7970
%N 1
%P 797010-797010-10
%@ 0277-786X
%D 2011-03-17
%I SPIE
%~ DeepDyve