%0 Journal Article
%T Strain analysis of arsenic-doped silicon using CBED rocking curves of low-order reflections
%A Tsuda,, Kenji
%A Mitsuishi,, Hajime
%A Terauchi,, Masami
%A Kawamura,, Kazuo
%J Journal of Electron Microscopy
%V 56
%N 2
%P 57-61
%@ 2050-5698
%D 2007-04-01
%I Oxford Academic
%~ DeepDyve