%0 Journal Article %T Elaboration of gallium arsenide technology in Georgia for development of microelectronic devices %A Khuchua, Nina P. %A Diehl, Roland %J Proceedings of SPIE %V 5401 %N 1 %P 344-353 %@ 0277-786X %D 2004-05-28 %I SPIE %~ DeepDyve