%0 Journal Article
%T Electron holography study for two-dimensional dopant profile measurement with specimens prepared by backside ion milling
%A Yoo, Jung Ho
%A Yang, Jun-Mo
%A Ulugbek, Shaislamov
%A Ahn, Chi Won
%A Hwang, Wook-Jung
%A Park, Joong Keun
%A Park, Chul Min
%A Hong, Seung Bum
%A Kim, Joong Jung
%A Shindo, Daisuke
%J Journal of Electron Microscopy
%V 57
%N 1
%P 13-18
%@ 2050-5698
%D 2008-01-05
%I Oxford University Press
%~ DeepDyve