%0 Journal Article
%T Monolithic integration of capacitive sensors using a double-side CMOS MEMS post process
%A Sun, Chih-Ming
%A Wang, Chuanwei
%A Tsai, Ming-Han
%A Hsieh, Hsieh-Shen
%A Fang, Weileun
%J Journal of Micromechanics and Microengineering
%V 19
%N 1
%P 9
%@ 0960-1317
%D 2009-01-01
%~ DeepDyve