%0 Journal Article
%T ZnO-Based Antireflection Layers Obtained by Electron-Beam Evaporation
%A Markov, L. K.
%A Pavluchenko, A. S.
%A Smirnova, I. P.
%J Semiconductors
%V 56
%N 2
%P 85-90
%@ 1063-7826
%D 2022-02-01
%I Pleiades Publishing
%~ DeepDyve