%0 Journal Article
%T Learning from native defects on EUV mask blanks
%A Gallagher, Emily
%A Wagner, Alfred
%A Lawliss, Mark
%A McIntyre, Gregory
%A Seki, Kazunori
%A Isogawa, Takeshi
%A Nash, Steven
%J Proceedings of SPIE
%V 9256
%P 92560K-92560K-8
%@ 0277-786X
%D 2014-07-28
%I SPIE
%~ DeepDyve