%0 Journal Article
%T Selective Heating of Transition Metal Usings Hydrogen Plasma and Its Application to Formation of Nickel Silicide Electrodes for Silicon Ultralarge-Scale Integration Devices
%A Arai, Tetsuji
%A Nakaie, Hiroki
%A Kamimura, Kazuki
%A Nakamura, Hiroyuki
%A Ariizumi, Satoshi
%A Ashizawa, Satoki
%A Arimoto, Keisuke
%A Yamanaka, Junji
%A Sato, Tetsuya
%A Nakagawa, Kiyokazu
%A Takamatsu, Toshiyuki
%A ,
%J Journal of Materials Science and Chemical Engineering
%@ 2327-6045
%D 2016-01-01
%I Scientific Research Publishing, Inc.
%~ DeepDyve