%0 Journal Article
%T Optical Microanalysis In Microelectronic Device And Packaging Manufacture
%A Popek, K. M.
%A Ramsey, J. N. ..
%J Proceedings of SPIE
%V 411
%P 23-29
%@ 0277-786X
%D 1983-11-04
%I SPIE
%~ DeepDyve