%0 Journal Article %T A review of terahertz phase modulation from free space to guided wave integrated devices %A Zeng, Hongxin %A Gong, Sen %A Wang, Lan %A Zhou, Tianchi %A Zhang, Yaxin %A Lan, Feng %A Cong, Xuan %A Wang, Luyang %A Song, Tianyang %A Zhao, YunCheng %A Yang, Ziqiang %A Mittleman, Daniel M. %J Nanophotonics %V 11 %N 3 %P 415-437 %@ 2192-8614 %D 2022-01-03 %I De Gruyter %~ DeepDyve