%0 Journal Article %T IrO2/Pb(ZrxTi1-x)O3(PZT)/Pt Ferroelectric Thin-Film Capacitors Resistant to an Interlayer-Dielectric-Deposition Process %A Kushida-Abdelghafar, Keiko %A Fujisaki, Yoshihisa %J Japanese Journal of Applied Physics %V 37 %N 7A %@ 0021-4922 %D 1998-07-01 %~ DeepDyve