%0 Journal Article
%T IrO2/Pb(ZrxTi1-x)O3(PZT)/Pt Ferroelectric Thin-Film Capacitors Resistant to an Interlayer-Dielectric-Deposition Process
%A Kushida-Abdelghafar, Keiko
%A Fujisaki, Yoshihisa
%J Japanese Journal of Applied Physics
%V 37
%N 7A
%@ 0021-4922
%D 1998-07-01
%~ DeepDyve