%0 Journal Article
%T Anti-reflection for monocrystalline silicon from diamond-like carbon films deposited by magnetron sputtering
%A Tan, Xin
%A Zhai, Hang
%A Meng, Keke
%A Zhang, Zhongyi
%J Materials Research Express
%V 8
%N 9
%P 9
%D 2021-09-01
%I IOP Publishing
%~ DeepDyve