%0 Journal Article
%T Importance of Thermophysical Properties of Thin Films in Ultra-Large-Scale Integrated Circuits and Beyond
%A Saxena, A.
%J International Journal of Thermophysics
%V 19
%N 3
%P 961-967
%@ 0195-928X
%D 2004-10-24
%I Kluwer Academic Publishers-Plenum Publishers
%~ DeepDyve