%0 Journal Article
%T Hybrid metrology for nanometric energy harvesting devices
%A Siaudinyte, Lauryna
%A Hansen, P-E
%A Koops, R
%A Xu, J
%A Peiner, E
%J Measurement Science and Technology
%V 34
%N 9
%P 8
%@ 0957-0233
%D 2023-09-01
%I IOP Publishing
%~ DeepDyve