%0 Journal Article
%T Dynamic modeling for X-Y working table using method of state variable
%A Yu, Liandong
%A Wang, Xiaofei
%J Proceedings of SPIE
%V 7130
%N 1
%P 71300U-71300U-6
%@ 0277-786X
%D 2008-12-17
%I SPIE
%~ DeepDyve