%0 Journal Article
%T Capacitive rf MEMS switch with composite beam
%A Miao, Min
%A Hao, Yilong
%A Zhang, Haixia
%J Proceedings of SPIE
%V 4928
%N 1
%P 248-255
%@ 0277-786X
%D 2002-09-10
%I SPIE
%~ DeepDyve