%0 Journal Article
%T Laser system for measuring MEMS relief created by the method of deep reactive ion etching
%A Maňka, Tadeáš
%A Šerý, Mojmír
%A Krátký, Stanislav
%A Zemánek, Pavel
%J Proceedings of SPIE
%V 10976
%P 109760M-109760M-7
%@ 0277-786X
%D 2018-12-18
%I SPIE
%~ DeepDyve