%0 Journal Article
%T Improvement of the Crystallinity of Silicon Films Deposited by Hot-Wire Chemical Vapor Deposition with Negative Substrate Bias
%A Zhang, Lei
%A Shen, Honglie
%A You, Jiayi
%J Journal of Electronic Materials
%V 42
%N 8
%P 2464-2469
%@ 0361-5235
%D 2013-05-25
%I Springer US
%~ DeepDyve