%0 Journal Article
%T Analysis and reduction of leakage current of 2 kV monolithic isolator with wide trench spiral isolation structure
%A Takeuchi, Yusuke
%A Kuroda, Rihito
%A Sugawa, Shigetoshi
%J Japanese Journal of Applied Physics
%V 55
%N 4S
%P 5
%@ 0021-4922
%D 2016-04-01
%~ DeepDyve