%0 Journal Article
%T Manufacturing engineering use of data management to analyze and control stepper performance in existing fabs and on stepper evaluations for new tools
%A Ackmann, Paul W.
%J Proceedings of SPIE
%V 2197
%N 1
%P 804-814
%@ 0277-786X
%D 1994-05-17
%I SPIE
%~ DeepDyve