%0 Journal Article
%T Highly sensitive x-ray and electron-beam resists using chemical amplification
%A Dammel, Ralph R.
%A Lindley, Charlet R.
%A Pawlowski, Georg
%A Scheunemann, Ude
%J Proceedings of SPIE
%V 1262
%N 1
%P 378-390
%@ 0277-786X
%D 1990-06-01
%I SPIE
%~ DeepDyve