%0 Journal Article
%T Phosphorus Doping and Sharp Profiles in Silicon and Silicon‐Germanium Epitaxy by Rapid Thermal Chemical Vapor Deposition
%A Yang, Min
%A Carroll, Malcolm
%A Sturm, J. C.
%A Büyüklimanli, Temel
%J Journal of the Electrochemical Society
%V 147
%N 9
%P 3541-3545
%@ 0013-4651
%D 2000-09-01
%~ DeepDyve