%0 Journal Article
%T Chemical vapor deposition of ruthenium and ruthenium oxide thin films for advanced complementary metal-oxide semiconductor gate electrode applications
%A Papadatos, Filippos
%A Consiglio, Steve
%A Skordas, Spyridon
%A Eisenbraun, Eric T.
%A Kaloyeros, Alain E.
%A Peck, John
%A Thompson, David
%A Hoover, Cynthia
%J Journal of Materials Research
%V 19
%N 10
%P 2947-2955
%@ 0884-2914
%D 2004-10-01
%I Springer International Publishing
%~ DeepDyve