%0 Journal Article
%T Determination of Particle Size Distribution in Oxide Abrasive Slurry After Chemical Mechanical Polishing Process Using Raman Spectroscopy
%A Choe, Jin Hyun
%A Kim, Jin Seok
%A Ahn, Da Won
%A Jung, Eun Soo
%A Pyo, Sung Gyu
%J Electronic Materials Letters
%V 19
%N 4
%P 350-358
%@ 1738-8090
%D 2023-07-01
%I The Korean Institute of Metals and Materials
%~ DeepDyve