%0 Journal Article
%T Design of filament-type auxiliary ion source and study on its improvement of thin film parameters
%A Ren, Yi
%A Zhang, Yin
%A Zhou, Yadong
%A Jin, Shangzhong
%J Proceedings of SPIE
%V 13066
%P 130660J-130660J-8
%@ 0277-786X
%D 2024-02-08
%I SPIE
%~ DeepDyve