%0 Journal Article
%T Absolute flatness measurements by Fizeau interferometer and 3D scanning deflectometric profiler
%A Kondo, Yohan
%A Bitou, Youichi
%J Proceedings of SPIE
%V 11492
%P 1149203-1149203-9
%@ 0277-786X
%D 2020-08-21
%I SPIE
%~ DeepDyve