%0 Journal Article
%T Where physics meets chemistry: Thin film deposition from reactive plasmas
%A Michelmore, Andrew
%A Whittle, Jason D.
%A Bradley, James W.
%A Short, Robert D.
%J Frontiers of Chemical Science and Engineering
%V 10
%N 4
%P 441-458
%@ 2095-0179
%D 2016-12-01
%I Higher Education Press
%~ DeepDyve